貝意克二維材料生長CVD系統
- 品名： 貝意克二維材料生長CVD系統
- 型號： BTF-1200C-400C-SL
- 產品詳情
- 規格參數
主要特點Main features
前端配有預熱爐，可用于蒸發固態源
Equipped with a preheating furnace for evaporating solid state sources
加熱爐選用滑軌爐，可實現快速升溫/降溫，縮短實驗時間
Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.
法蘭端采用卡箍密封，這樣就使進料出料更加的方便。
The flange end is sealed by a clamp, which makes the feeding and discharging more convenient.
進氣系統可以按照客戶的實驗需求配置幾路質量流量計，流量計的量程也可以選擇不同的配置，真空系統也可以根據客戶的需求選擇配置各種真空泵。
Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements
技術參數Technical Parameters
Preheating Furnace預熱爐 | |
Max. Temp | 400℃ |
溫區長度zone length | 100mm |
Heating furnace滑軌爐 | |
Max. Temp | 1200℃ |
Power 功率 | 2KW (220V) |
溫區長度zone length | Heating：440mm Constant：200mm |
Temperature Controller 控溫方式 | lPID automatic control and auto-tune function. 模糊PID控制和自整定調節 l30 programmable segments for precise thermal processing. 智能化30段可編程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超溫和斷偶報警功能 |
Heating Elements 加熱元件 | ·Resistance wire, Fe-Cr-Al Alloy doped by Mo 電阻絲（摻鉬鐵鉻鋁合金） |
Temperature Accuracy 控溫精度 | +/- 1℃ |
Processing tube 爐管 | Size：Φ50*1650mm 尺寸：Φ50*1650mm |
Gas supply system氣路系統 | |
連接頭類型Connector style | 雙卡套不銹鋼接頭Double cutting ferrule stainless steel connector |
標準量程（N2)Standard range(N2) | 50sccm、100sccm、200sccm、500sccm； （可根據用戶要求定制）optional |
準確度Accuracy | ·±1.5%FS |
響應時間Response time | Gas characteristics：1～4sec 氣特性 Electrical characteristics:10sec 電特性 |
線性Linearity | ±0.5～1.5% |
Working pressure difference range 工作壓差范圍 | 0.1～0.5MPa |
Max. pressure**壓力 | 3MPa |
壓力真空表Pressure vacuum gauge | －0.1～0.15 MPa, 0.01 MPa/格 |
Vacuum unit真空系統 | |
空氣相對濕度Relative air humidity | ≤85% |
抽速pumping | 10m3/h |
真空度vacuum | 10-1Pa |
容油量Oil capacity | 1.1L |
轉速Rotation rate | 1450rpm |
噪音Noise | 50dB |
