貝意克等離子體增強回轉PECVD系統
- 品名： 貝意克等離子體增強回轉PECVD系統
- 型號： BTF-1200C-R-PECVD
- 產品詳情
- 規格參數
主要特點Main features:
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
我司研制的回轉PECVD系統能使整個實驗腔體都處于輝光產生區，輝光均勻等效，這種技術很好的解決了傳統等離子工作不穩定狀態，這樣離子化的范圍和強度是傳統PECVD的百倍，并解決了物料不均勻堆積現象
Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
該款設備選用特殊形狀(兩頭細中間粗)的石英管作為化學氣相沉積的反應室;加熱的同時爐管可360度旋轉，管內壁有石英擋片幫助粉體材料翻炒有助于燒結得更均勻;而且爐體可左右大角度傾斜，方便進出料，傾斜角度在0~35°可調。
Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
此款設備現廣泛應用于低溫石墨烯制備實驗、粉體材料碳包覆實驗。
技術參數Technical Parameters
Furnace加熱爐 | |
Max. Tem**溫度 | 1200℃ |
Heating zone length加熱區長度 | 440mm |
Constant zone length恒溫區長度 | 200mm |
控溫方式 | lPID automatic control and auto-tune function. 模糊PID控制和自整定調節 l30 programmable segments for precise thermal processing. 智能化30段可編程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超溫和斷偶報警功能 lOperation interface is 7 "industrial control computer 操作界面為7”工控電腦 |
Heating Elements 加熱元件 | ·Resistance wire, Fe-Cr-Al Alloy doped by Mo 電阻絲（摻鉬鐵鉻鋁合金） |
Temperature Accuracy 控溫精度 | +/- 1℃ |
Processing tube 爐管 | Size：Φ60*420+Φ100*360+Φ60*420mm 尺寸：Φ60*420+Φ100*360+Φ60*420mm Furnace tube rotation rate：3~13r/min 爐管轉速：3~13r/min |
Furnace body inclination angle | 0~35°（adjustable） |
PE source PE源 | |
Signal frequency信號頻率 | 13.56 MHz±0.005% |
Power output range功率輸出范圍 | 0-500W |
RF output interface射頻輸出接口 | 50 Ω, N-type, female |
Power stability功率穩定性 | ≤5W |
Gas supply system氣路系統 | |
High precision mass Flowmeter（Range optional） | 高精度質量流量計（量程可選） |
Accuracy準確度 | ±1.5% |
Response accuracy響應精度
| ·±0.2% |
Response time響應時間
| Gas characteristics：1～4sec 氣特性 Electrical characteristics:10sec 電特性 |
Working pressure difference range工作壓差范圍
| 0.1～0.5MPa |
Max. pressure**壓力
| ·3MPa |
Connection 連接頭類型
| Φ6mmDouble clasp stainless steel joint Φ6mm雙卡套不銹鋼接頭
|
Vacuum unit真空系統 | |
KF25 series bellows and manual stopper valves | 采用KF25系列波紋管和手動擋板閥 |
Vacuum up to10-1Pa | 真空度可達10-1Pa |
The value can be displayed intuitively by the digital display vacuum tester | 數顯真空測試儀可直觀的顯示數值 |
