貝意克小型回轉PECVD系統
- 品名： 貝意克小型回轉PECVD系統
- 型號： BTF-1200C-R-S-PECVD
- 產品詳情
- 規格參數
主要特點Main features
該設備爐管可360度旋轉，管內壁有石英擋片幫助粉料翻轉有助于燒結得更均勻;
The tube of the equipment can be rotated 360 degrees, and the quartz baffle on the inner wall of the tube helps the powder to be turned over to help the sintering to be more uniform;
可左右大角度傾斜，方便出放料，傾斜角度在0~35°之間;
It can be tilted from left to right at a large angle to facilitate the discharge. The tilt angle is between 0~35°.
該款設備是全自動Plasma增強CVD系統(PECVD)，連續可控溫度以及Plasma強度等，配備真空系統，可以實現低壓條件下的實驗，針對低溫石墨烯、碳納米管生長等。PECVD系統能使整個實驗腔體都處于輝光產生區，輝光均勻等效，這種技術很好的解決了傳統等離子工作不穩定狀態，這樣離子化的范圍和強度是傳統PECVD的百倍，并解決了物料不均勻堆積現象;
The device is a fully automated Plasma Enhanced CVD System (PECVD),can achieve continuous sliding temperature zones and to continuously control the temperature and plasma intensity.Equipped with vacuum unit,can realize experiments under low pressure conditions, such as low temperature graphene and carbon nanotube growth. PECVD system enables the entire experimental cavity to be in the glow generation area, and the glow is evenly equivalent. This technique solves the unstable state of the traditional plasma operation, so the range and intensity of ionization. It is a hundred times more than traditional PECVD and solves the problem of uneven material accumulation.
本款設備可以做金屬復合石墨烯材料，是目前**端的金屬復合材料制備設備。
Used for prepare metal composite graphene material,is the most high-end preparation equipment for metal composite material
技術參數Technical Parameters
Furnace加熱爐 | |
Max. Temp | 1100℃ |
Temperature Controller 控溫方式 | lPID automatic control and auto-tune function. 模糊PID控制和自整定調節 l30 programmable segments for precise thermal processing. 智能化30段可編程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超溫和斷偶報警功能 l10" LCD touch screen and industrial instrumentation dual temperature control 10"液晶觸屏與工控儀表雙重控溫 |
Heating Elements 加熱元件 | ·Resistance wire, Fe-Cr-Al Alloy doped by Mo 電阻絲（摻鉬鐵鉻鋁合金） |
Temperature Accuracy 控溫精度 | +/- 1℃ |
Processing tube 爐管 | ·Size：Φ25*800（middle sizeΦ50*225） 尺寸：Φ25*800（中間部位尺寸Φ50*225） Furnace tube rotation rate：3~13r/min 爐管轉速：3~13r/min |
Furnace body inclination angle | 0~35°（adjustable） |
PE source PE源 | |
Signal frequency信號頻率 | 13.56 MHz±0.005% |
Power output range功率輸出范圍 | 0-150W |
RF output interface射頻輸出接口 | 50 Ω, N-type, female |
Power stability功率穩定性 | ≤5W |
Gas supply system氣路系統 | |
High precision mass Flowmeter（Range optional） | 高精度質量流量計（量程可選） |
Accuracy準確度 | ±1.5% |
Response accuracy響應精度 | ·±0.2% |
Response time響應時間 | Gas characteristics：1～4sec 氣特性 Electrical characteristics:10sec 電特性 |
Working pressure difference range工作壓差范圍 | 0.1～0.5MPa |
Max. pressure**壓力 | 3MPa |
Connection 連接頭類型 | Φ6mmDouble clasp stainless steel joint Φ6mm雙卡套不銹鋼接頭 |
Vacuum unit真空系統 | |
KF25 series bellows and manual stopper valves | 采用KF25系列波紋管和手動擋板閥 |
Vacuum up to10-1Pa | 真空度可達10-1Pa |
The value can be displayed intuitively by the digital display vacuum tester | 數顯真空測試儀可直觀的顯示數值 |
